JPH0536273Y2 - - Google Patents
Info
- Publication number
- JPH0536273Y2 JPH0536273Y2 JP20119187U JP20119187U JPH0536273Y2 JP H0536273 Y2 JPH0536273 Y2 JP H0536273Y2 JP 20119187 U JP20119187 U JP 20119187U JP 20119187 U JP20119187 U JP 20119187U JP H0536273 Y2 JPH0536273 Y2 JP H0536273Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- storage case
- positioning lever
- wafers
- wafer storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 claims description 115
- 238000004544 sputter deposition Methods 0.000 claims description 25
- 230000007246 mechanism Effects 0.000 claims description 21
- 238000003780 insertion Methods 0.000 claims description 12
- 230000037431 insertion Effects 0.000 claims description 12
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 102100027340 Slit homolog 2 protein Human genes 0.000 description 1
- 101710133576 Slit homolog 2 protein Proteins 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005478 sputtering type Methods 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20119187U JPH0536273Y2 (en]) | 1987-12-28 | 1987-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20119187U JPH0536273Y2 (en]) | 1987-12-28 | 1987-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01104724U JPH01104724U (en]) | 1989-07-14 |
| JPH0536273Y2 true JPH0536273Y2 (en]) | 1993-09-14 |
Family
ID=31491563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20119187U Expired - Lifetime JPH0536273Y2 (en]) | 1987-12-28 | 1987-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0536273Y2 (en]) |
-
1987
- 1987-12-28 JP JP20119187U patent/JPH0536273Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01104724U (en]) | 1989-07-14 |
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